مرکز منطقه ای اطلاع رساني علوم و فناوري - A Low-stress Trench Isolation Structure And Its Electrical Characteristics Of Sub 20 Ps High-speed ECL

DocumentCode :

2745841

Title :

A Low-stress Trench Isolation Structure And Its Electrical Characteristics Of Sub 20 Ps High-speed ECL

Author :

Matsuda, S. ; Itoh, N. ; Nakajima, H. ; Inou, K. ; Iinuma, T. ; Yoshino, C. ; Tsuboi, Y. ; Katsumata, Y. ; Iwai, H. ; Hafa

Author_Institution :

Toshiba Corporation

fYear :

1993

fDate :

17-19 May 1993

Firstpage :

Lastpage :

fLanguage :

English

Publisher :

ieee

Conference_Titel :

VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on

Conference_Location :

Kyoto, Japan

Type :

conf

DOI :

10.1109/VLSIT.1993.760251

Filename :

760251

Link To Document :