DocumentCode :
2745944
Title :
ONO Interpoly Dielectric Scaling Limit For Non-volatile Memory Devices
Author :
Yamaguchi, Y. ; Sakagami, E. ; Arai, N. ; Sato, M. ; Kamiya, E. ; Yoshikawa, K. ; Meguro, H. ; Tsunoda, H. ; Mori, S.
Author_Institution :
TOSHIBA Corporation
fYear :
1993
fDate :
17-19 May 1993
Firstpage :
85
Lastpage :
86
fLanguage :
English
Publisher :
ieee
Conference_Titel :
VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on
Conference_Location :
Kyoto, Japan
Type :
conf
DOI :
10.1109/VLSIT.1993.760257
Filename :
760257
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2745944
