Title :
SAW velocities in X-cut LiTaO3
Author :
Anhorn, M. ; Engan, H.E.
Author_Institution :
Div. of Phys. Electron., Norwegian Inst. of Technol., Trondheim, Norway
Abstract :
SAW (surface acoustic wave) devices based on propagation in 112.2° Y-rotated X-cut LiTaO3 were investigated. The SAW propagation velocity in the entire X-surface was characterized by laser-probe measurements. Results obtained include velocities for free and shorted surfaces. The effect of metal loading on velocity has been measured. The results are given as trigonometric expansions with tabulated coefficients
Keywords :
acoustic wave velocity; surface acoustic wave devices; surface acoustic waves; LiTaO3; SAW propagation velocity; SAW velocities; X-cut LiTaO3; free surfaces; laser-probe measurements; metal loading; shorted surfaces; tabulated coefficients; trigonometric expansions; Acoustic measurements; Acoustic transducers; Laser beam cutting; Laser theory; Optical propagation; Performance evaluation; Probes; Surface acoustic wave devices; Surface acoustic waves; Velocity measurement;
Conference_Titel :
Ultrasonics Symposium, 1989. Proceedings., IEEE 1989
Conference_Location :
Montreal, Que.
DOI :
10.1109/ULTSYM.1989.67010
