مرکز منطقه ای اطلاع رساني علوم و فناوري - Rapid Thermal Processing For Sub-Half-Micron CMOS IC Manufacturing

DocumentCode :

2746103

Title :

Rapid Thermal Processing For Sub-Half-Micron CMOS IC Manufacturing

Author :

Moslehi, M.M. ; Chapman, R.A. ; Velo, L. ; Kuehne, J. ; Paranjpe, A. ; Schaper, C. ; Huang, S. ; Najm, H. ; Breedijk, T. ; Yin, D. ; Davis, C.

Author_Institution :

Texas Instruments

fYear :

1993

fDate :

17-19 May 1993

Firstpage :

101

Lastpage :

102

fLanguage :

English

Publisher :

ieee

Conference_Titel :

VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on

Conference_Location :

Kyoto, Japan

Type :

conf

DOI :

10.1109/VLSIT.1993.760265

Filename :

760265

Link To Document :