Title :
18 SEM2 Semiconductor Materials
Abstract :
Summary form only for tutorial.
Keywords :
Annealing; Nitrogen; Optical films; Photoluminescence; Rough surfaces; Semiconductor films; Semiconductor materials; Silicon; Surface morphology; Surface roughness;
Conference_Titel :
Electrical and Electronics Engineering, 2006 3rd International Conference on
Conference_Location :
Veracruz
Print_ISBN :
1-4244-0402-9
DOI :
10.1109/ICEEE.2006.251837
