DocumentCode

2746157

Title

Ecologically-Safe Ionized Water Treatment For Wafer Processing

Author

Aoki, H. ; Nakamori, M. ; Aoto, N. ; Ikawa, E.

Author_Institution

NEC Corporation

fYear

1993

fDate

17-19 May 1993

Firstpage

107

Lastpage

108

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on

Conference_Location

Kyoto, Japan

Type

conf

DOI

10.1109/VLSIT.1993.760268

Filename

760268