Title :
A pH Controlled Chemical Mechanical Polishing Method For Ultra-thin Bonded SOI Wafer
Author :
Sugimoto, F. ; Horie, H. ; Arimoto, Y. ; Ito, T.
Author_Institution :
Fujitsu laboratories ltd.
Conference_Titel :
VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on
Conference_Location :
Kyoto, Japan
DOI :
10.1109/VLSIT.1993.760271
