• DocumentCode
    2746241
  • Title

    A Manufacturable Chemical-Mechanical Polish Technology With A Novel Low-Permittivity Stop-Layer For Oxide Polishing

  • Author

    Poon, S. ; Gelatos, A. ; Perera, A.H. ; Hoffman, M.

  • Author_Institution
    Motorola Inc.
  • fYear
    1993
  • fDate
    17-19 May 1993
  • Firstpage
    115
  • Lastpage
    116
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on
  • Conference_Location
    Kyoto, Japan
  • Type

    conf

  • DOI
    10.1109/VLSIT.1993.760272
  • Filename
    760272
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2746241