Title :
A Superior TiN/TiSi/sub 2/ Barrier Layer By Using Sputter Deposition From A TiN/sub 0.4/ Alloy Target And Subsequent RTN
Author :
Nakamura, H. ; Fushimi, K. ; Sakaya, Y. ; Ajioka, T. ; Hiraki, A. ; Kubota, K.
Author_Institution :
Oki Electric Industry Co.,Ltd.
Conference_Titel :
VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on
Conference_Location :
Kyoto, Japan
DOI :
10.1109/VLSIT.1993.760281
