Improved Interconnect Yield Through Surface Control By Silylation (SCS) Method

Author

Yano, K. ; Yamanaka, M. ; Terai, Y. ; Sugiyama, T. ; Kubota, M. ; Endo, M. ; Nomura, N.

Author_Institution

Matsushita Electric Industrial Co.,Ltd.

fYear

1993

fDate

17-19 May 1993

Firstpage

129

Lastpage

130

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on

Conference_Location

Kyoto, Japan

Type

DOI

10.1109/VLSIT.1993.760282

Filename

760282

Link To Document