DocumentCode :
2746398
Title :
Programmable Factory For Adaptable IC Manufacturing
Author :
Saraswat, K.C. ; Wood, S.C. ; Plummer, J.D. ; Losleben, P.
Author_Institution :
Stanford University
fYear :
1993
fDate :
17-19 May 1993
Firstpage :
131
Lastpage :
132
fLanguage :
English
Publisher :
ieee
Conference_Titel :
VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on
Conference_Location :
Kyoto, Japan
Type :
conf
DOI :
10.1109/VLSIT.1993.760283
Filename :
760283
Link To Document :
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