SPIRIT - A Bipolar/BiCMOS Isolation Technology For High-Performance VLSI

Author

Burghartz, J.N. ; Cifuentes, A.O. ; Warnock, J. ; McIntosh, R.C. ; Stanis, C.L. ; Cressler, J.D. ; Sun, J.Y.-C. ; Comfort, J.H. ; Jenskins

Author_Institution

IBM Semiconductor Research and Development Center

fYear

1993

fDate

17-19 May 1993

Firstpage

143

Lastpage

144

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on

Conference_Location

Kyoto, Japan

Type

DOI

10.1109/VLSIT.1993.760289

Filename

760289

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