مرکز منطقه ای اطلاع رساني علوم و فناوري - New Technologies Of KrF Excimer Laser Lithography System In 0.25 Micron Complex Circuit Patterns

DocumentCode :

2746521

Title :

New Technologies Of KrF Excimer Laser Lithography System In 0.25 Micron Complex Circuit Patterns

Author :

Matsuo, T. ; Yamashita, K. ; Endo, M. ; Hashimoto, K. ; Koizumi, T. ; Katsuyama, A. ; Sasago, M. ; Nomura, N.

Author_Institution :

Matsushita Electric Industrial Co.,Ltd.

fYear :

1993

fDate :

17-19 May 1993

Firstpage :

145

Lastpage :

146

fLanguage :

English

Publisher :

ieee

Conference_Titel :

VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on

Conference_Location :

Kyoto, Japan

Type :

conf

DOI :

10.1109/VLSIT.1993.760290

Filename :

760290

Link To Document :