Title : 
A new probe card technology using compliant MicrospringsTM 
         
        
            Author : 
Sporck, Nicholas
         
        
            Author_Institution : 
FormFactor Inc., Livermore, CA, USA
         
        
        
        
        
        
            Abstract : 
Recent trends in the semiconductor industry such as the widespread use of C4, ever increasing demands for testing more chips in parallel, and faster edge rates, have conspired to present major challenges to currently available probe card technologies. This paper describes a new probe card technology, its characteristics, and how it successfully addresses these challenges
         
        
            Keywords : 
aluminium; lead bonding; printed circuit testing; Al; Al pads; C4 probing; FormFactor; Microsprings; PCB; SEM; edge rates; multiple die probing; probe card technology; semiconductor industry; space transformer; Assembly; Bandwidth; Construction industry; Costs; Impedance; Probes; Space technology; Structural beams; Testing; Tungsten;
         
        
        
        
            Conference_Titel : 
Test Conference, 1997. Proceedings., International
         
        
            Conference_Location : 
Washington, DC
         
        
        
            Print_ISBN : 
0-7803-4209-7
         
        
        
            DOI : 
10.1109/TEST.1997.639659