DocumentCode :
2747089
Title :
Investigation of on-chip double-shieled QHR device in ac regime
Author :
Kaneko, Nobu-hisa ; Schurr, Jürgen ; Ahlers, Franz J. ; Domae, Atsushi ; Oe, Takehiko ; Kiryu, Shogo
Author_Institution :
AIST, Nat. Metrol. Inst. of Japan, Tsukuba, Japan
fYear :
2012
fDate :
1-6 July 2012
Firstpage :
193
Lastpage :
194
Abstract :
For the investigation of ac performance, two on-chip double-shielded QHR devices and two double-shielded chip carriers were fabricated at National Metrology Institute of Japan and have been studied with ac at Physikalisch-Technische Bundesanstalt. It has been measured that the shape of the i = 2 plateaux at zero shield-potential is not flat and the linear frequency dependence of the quantum Hall resistance amounts to -0.14 (μΩ/Ω) /kHz. Deferent shield designs are proposed to reduce the frequency dependence.
Keywords :
Hall effect devices; quantum Hall effect; AC regime performance; Japan; National Metrology Institute; Physikalisch-Technische Bundesanstalt; double-shielded chip carrier; linear frequency dependence; on-chip double-shieled QHR device; quantum Hall resistance; zero shield-potential; Electrical resistance measurement; Frequency dependence; Performance evaluation; Resistance; Semiconductor device measurement; Shape measurement; System-on-a-chip; QHR device; ac QHR; double-shielded configuration; quantized Hall resistance;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Precision Electromagnetic Measurements (CPEM), 2012 Conference on
Conference_Location :
Washington, DC
ISSN :
0589-1485
Print_ISBN :
978-1-4673-0439-9
Type :
conf
DOI :
10.1109/CPEM.2012.6250867
Filename :
6250867
Link To Document :
بازگشت