Title :
Sidewall roughness-induced mode splitting and scattering loss in high Q microdisk resonators: Theory and experiment
Author :
Li, Qing ; Eftekhar, Ali A. ; Adibi, Ali
Author_Institution :
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
We report an important experimental observation that in high-Q silicon microdisk resonators, the mode splitting and scattering loss can vary significantly over the azimuthal orders. A theoretical roughness model is developed to explain this phenomenon.
Keywords :
integrated optics; light scattering; micro-optomechanical devices; micromechanical resonators; optical losses; optical resonators; silicon-on-insulator; surface roughness; Si; azimuthal orders; high-Q microdisk resonators; scattering loss; sidewall roughness-induced mode splitting; theoretical roughness model; Absorption; Finite element methods; Optical losses; Optical resonators; Scattering; Silicon;
Conference_Titel :
Photonics Conference (PHO), 2011 IEEE
Conference_Location :
Arlington, VA
Print_ISBN :
978-1-4244-8940-4
DOI :
10.1109/PHO.2011.6110569
