Title :
Compact large-cross-section GaN directional couplers
Author :
Zhang, Yanfeng ; McKnight, Loyd ; Watson, Ian M. ; Gu, Erdan ; Calvez, Stephane ; Dawson, Martin D.
Author_Institution :
Inst. of Photonics, Univ. of Strathclyde, Glasgow, UK
Abstract :
We report the design, fabrication and characterization of large-cross-section GaN waveguide directional couplers with mode-converting tapers. A positive RIE lag effect has been shown to significantly reduce overall device footprint.
Keywords :
gallium compounds; optical directional couplers; wide band gap semiconductors; GaN; RIE lag effect; compact large cross section; mode converting tapers; waveguide directional couplers; Couplings; Directional couplers; Etching; Gallium nitride; Optical device fabrication; Optical waveguides; GaN; RIE lag; directional coupler; plasma etching; waveguide;
Conference_Titel :
Photonics Conference (PHO), 2011 IEEE
Conference_Location :
Arlington, VA
Print_ISBN :
978-1-4244-8940-4
DOI :
10.1109/PHO.2011.6110599
