DocumentCode
2749127
Title
Athermal silicon waveguides for aqueous evanescent biosensor applications
Author
Kim, Kangbaek ; Pafchek, Robert M. ; Koch, Thomas L.
Author_Institution
Dept. of Electr. & Comput. Eng., Lehigh Univ., Bethlehem, PA, USA
fYear
2011
fDate
9-13 Oct. 2011
Firstpage
419
Lastpage
420
Abstract
Shallow-ridge silicon ring resonator sensors designed for high-sensitivity TM mode operation are fabricated on silicon-on-insulator (SOI), demonstrating complete cancellation of thermo-optic effects for aqueous solution operation near 300K.
Keywords
biosensors; integrated optics; optical waveguides; silicon; silicon-on-insulator; thermo-optical effects; TM mode operation; aqueous evanescent biosensor; athermal silicon waveguides; shallow-ridge silicon ring resonator sensors; silicon-on-insulator; temperature 300 K; thermo-optic effects; Optical ring resonators; Optical waveguides; Silicon; Silicon on insulator technology; Temperature measurement; Temperature sensors; Integrated optics; biomedical transducers; dielectric waveguides; nanotechnology;
fLanguage
English
Publisher
ieee
Conference_Titel
Photonics Conference (PHO), 2011 IEEE
Conference_Location
Arlington, VA
Print_ISBN
978-1-4244-8940-4
Type
conf
DOI
10.1109/PHO.2011.6110605
Filename
6110605
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