Title :
Athermal silicon waveguides for aqueous evanescent biosensor applications
Author :
Kim, Kangbaek ; Pafchek, Robert M. ; Koch, Thomas L.
Author_Institution :
Dept. of Electr. & Comput. Eng., Lehigh Univ., Bethlehem, PA, USA
Abstract :
Shallow-ridge silicon ring resonator sensors designed for high-sensitivity TM mode operation are fabricated on silicon-on-insulator (SOI), demonstrating complete cancellation of thermo-optic effects for aqueous solution operation near 300K.
Keywords :
biosensors; integrated optics; optical waveguides; silicon; silicon-on-insulator; thermo-optical effects; TM mode operation; aqueous evanescent biosensor; athermal silicon waveguides; shallow-ridge silicon ring resonator sensors; silicon-on-insulator; temperature 300 K; thermo-optic effects; Optical ring resonators; Optical waveguides; Silicon; Silicon on insulator technology; Temperature measurement; Temperature sensors; Integrated optics; biomedical transducers; dielectric waveguides; nanotechnology;
Conference_Titel :
Photonics Conference (PHO), 2011 IEEE
Conference_Location :
Arlington, VA
Print_ISBN :
978-1-4244-8940-4
DOI :
10.1109/PHO.2011.6110605
