Large scale integration - LSI1

A brief review of today´s processing of integrated circuits is given. The major trends in the development of advanced integrated electronics are identified as (1) the broadening of the integrated circuit concept to a large class of circuit function, (2) the processing of more complex circuits within relatively small chips of silicon, and (3) the processing of very large electronic functions on complete slices of silicon. This latter trend, called array technology, is then developed in detail. Emphasis is given to defining the key technological problems.