Title :
Deep-levels in silicon waveguides: A route to monolithic integration
Author :
Knights, A.P. ; Logan, D.F. ; Jessop, P.E. ; De La Rue, R.M. ; Velha, P. ; Sorel, M.
Author_Institution :
Dept. of Eng. Phys., McMaster Univ., Hamilton, ON, Canada
Abstract :
This summary describes the development of silicon waveguide photodetectors formed via the controlled introduction of deep-levels to induce sensitivity at wavelengths around 1550nm. This approach is monolithic and CMOS compatible.
Keywords :
integrated optics; optical waveguides; photodetectors; silicon; CMOS compatibility; monolithic integration; silicon waveguide photodetectors; wavelength 1550 nm; Optical device fabrication; Optical modulation; Optical sensors; Optical waveguides; Photonics; Silicon; Temperature measurement; interconnects; photodetector; photonics; silicon;
Conference_Titel :
Photonics Conference (PHO), 2011 IEEE
Conference_Location :
Arlington, VA
Print_ISBN :
978-1-4244-8940-4
DOI :
10.1109/PHO.2011.6110626
