Title :
Ultra-low-loss whispering gallery delay lines and resonators on a silicon chip
Author :
Lee, Hansuek ; Li, Jiang ; Chen, Tong ; Painter, Oskar ; Vahala, Kerry
Author_Institution :
Lab. of Appl. Phys., California Inst. of Technol., Pasadena, CA, USA
Abstract :
Using a wet etch process, 7 meter long waveguides having optical loss of 0.055dB/m are demonstrated. The same process produces resonators having Q factors as high as 750 million. Applications to microwave photonics are reviewed.
Keywords :
delay lines; dielectric waveguides; elemental semiconductors; microwave photonics; resonators; silicon; whispering gallery modes; Si; microwave photonics; silicon chip; size 7 m; ultra low loss resonators; ultra low loss whispering gallery delay lines; waveguides; wet etch process; microwave photonics; resonator; waveguide;
Conference_Titel :
Photonics Conference (PHO), 2011 IEEE
Conference_Location :
Arlington, VA
Print_ISBN :
978-1-4244-8940-4
DOI :
10.1109/PHO.2011.6110632