DocumentCode
2749607
Title
Ultra-low-loss whispering gallery delay lines and resonators on a silicon chip
Author
Lee, Hansuek ; Li, Jiang ; Chen, Tong ; Painter, Oskar ; Vahala, Kerry
Author_Institution
Lab. of Appl. Phys., California Inst. of Technol., Pasadena, CA, USA
fYear
2011
fDate
9-13 Oct. 2011
Firstpage
473
Lastpage
474
Abstract
Using a wet etch process, 7 meter long waveguides having optical loss of 0.055dB/m are demonstrated. The same process produces resonators having Q factors as high as 750 million. Applications to microwave photonics are reviewed.
Keywords
delay lines; dielectric waveguides; elemental semiconductors; microwave photonics; resonators; silicon; whispering gallery modes; Si; microwave photonics; silicon chip; size 7 m; ultra low loss resonators; ultra low loss whispering gallery delay lines; waveguides; wet etch process; microwave photonics; resonator; waveguide;
fLanguage
English
Publisher
ieee
Conference_Titel
Photonics Conference (PHO), 2011 IEEE
Conference_Location
Arlington, VA
Print_ISBN
978-1-4244-8940-4
Type
conf
DOI
10.1109/PHO.2011.6110632
Filename
6110632
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