DocumentCode :
2749797
Title :
Operational Energy Analysis of Plasmonic Imaging Lithography
Author :
Zhang, Teresa W. ; Bates, Sarah W. ; Dornfeld, David A.
Author_Institution :
Univ. of California, Berkeley
fYear :
2007
fDate :
7-10 May 2007
Firstpage :
97
Lastpage :
101
Abstract :
Plasmonic imaging lithography (PIL) is a new direct-write lithograghy process based on disk drive technology. Using the benchmark of similarly scaled masked and maskless lithography processes, this paper evaluates the operational energy use of PIL, as a component of manufacturing and environmental impact analysis. This study serves two purposes: to inform the sustainable development of this emerging technology, and to identify PIL as most appropriate for prototyping or highly agile manufacturing of 11 or fewer wafers per design change.
Keywords :
disc drives; masks; photolithography; direct-write lithograghy; disk drive; maskless lithography; operational energy analysis; plasmonic imaging lithography; Agile manufacturing; Appropriate technology; Disk drives; Image analysis; Lithography; Manufacturing processes; Plasmons; Prototypes; Pulp manufacturing; Sustainable development;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronics & the Environment, Proceedings of the 2007 IEEE International Symposium on
Conference_Location :
Orlando, FL
ISSN :
1095-2020
Print_ISBN :
1-4244-0861-X
Type :
conf
DOI :
10.1109/ISEE.2007.369374
Filename :
4222863
Link To Document :
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