Calibration techniques for scanning microwave microscopy

Two techniques are described for calibrating a scanning microwave microscope (SMM). The first technique enables spatially-resolved absolute capacitance measurements on the attofarad-to-femtofarad scale. The second technique enables profiling of dopant concentrations between 10¹⁶ to 10²⁰ dopant atoms per cm³. Notably, the sensitivity of the instrument to different dopant concentrations may be tuned by adjusting the SMM operating frequency. Both calibration techniques involve the use of specialized reference samples, in conjunction with modeling and data analysis.