DocumentCode
2750162
Title
A micropipe fabrication process
Author
Kuo, Chia-Lung ; Masuzawa, T. ; Fujino, M.
Author_Institution
Inst. of Ind. Sci., Tokyo Univ., Japan
fYear
1991
fDate
30 Jan-2 Feb 1991
Firstpage
80
Lastpage
85
Abstract
A novel process for fabricating a micropipe has been developed. This process is based on electrochemical deposition of metal onto a core or a microelectrode which is prepared by WEDG (wire electrodischarge grinding). This procedure is simple and the entire process can be carried out automatically. Using this method, one can produce a high-accuracy micropipe with a length 100 times its inner diameter. A 3-mm-long micropipe of 23-μm I.D. and 186-μm O.D. with extremely high precision of straightness, roundness, and concentricity was successfully manufactured. Owing to the advantages of WEDG, the inner and outer shapes of the micropipe can be controlled independently, and produceable shapes include various irregular sections, such as triangular, rectangular, and polygonal sections
Keywords
electrodeposition; electrodes; micromechanical devices; WEDG; concentricity; electrochemical deposition; microelectrode; micropipe fabrication process; polygonal sections; roundness; straightness; wire electrodischarge grinding; Aerospace industry; Contacts; Electrodes; Fabrication; Machining; Manufacturing; Rough surfaces; Shape control; Surface roughness; Wire;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1991, MEMS '91, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location
Nara
Print_ISBN
0-87942-641-1
Type
conf
DOI
10.1109/MEMSYS.1991.114773
Filename
114773
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