• DocumentCode
    2750162
  • Title

    A micropipe fabrication process

  • Author

    Kuo, Chia-Lung ; Masuzawa, T. ; Fujino, M.

  • Author_Institution
    Inst. of Ind. Sci., Tokyo Univ., Japan
  • fYear
    1991
  • fDate
    30 Jan-2 Feb 1991
  • Firstpage
    80
  • Lastpage
    85
  • Abstract
    A novel process for fabricating a micropipe has been developed. This process is based on electrochemical deposition of metal onto a core or a microelectrode which is prepared by WEDG (wire electrodischarge grinding). This procedure is simple and the entire process can be carried out automatically. Using this method, one can produce a high-accuracy micropipe with a length 100 times its inner diameter. A 3-mm-long micropipe of 23-μm I.D. and 186-μm O.D. with extremely high precision of straightness, roundness, and concentricity was successfully manufactured. Owing to the advantages of WEDG, the inner and outer shapes of the micropipe can be controlled independently, and produceable shapes include various irregular sections, such as triangular, rectangular, and polygonal sections
  • Keywords
    electrodeposition; electrodes; micromechanical devices; WEDG; concentricity; electrochemical deposition; microelectrode; micropipe fabrication process; polygonal sections; roundness; straightness; wire electrodischarge grinding; Aerospace industry; Contacts; Electrodes; Fabrication; Machining; Manufacturing; Rough surfaces; Shape control; Surface roughness; Wire;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 1991, MEMS '91, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
  • Conference_Location
    Nara
  • Print_ISBN
    0-87942-641-1
  • Type

    conf

  • DOI
    10.1109/MEMSYS.1991.114773
  • Filename
    114773