Title :
A micropipe fabrication process
Author :
Kuo, Chia-Lung ; Masuzawa, T. ; Fujino, M.
Author_Institution :
Inst. of Ind. Sci., Tokyo Univ., Japan
fDate :
30 Jan-2 Feb 1991
Abstract :
A novel process for fabricating a micropipe has been developed. This process is based on electrochemical deposition of metal onto a core or a microelectrode which is prepared by WEDG (wire electrodischarge grinding). This procedure is simple and the entire process can be carried out automatically. Using this method, one can produce a high-accuracy micropipe with a length 100 times its inner diameter. A 3-mm-long micropipe of 23-μm I.D. and 186-μm O.D. with extremely high precision of straightness, roundness, and concentricity was successfully manufactured. Owing to the advantages of WEDG, the inner and outer shapes of the micropipe can be controlled independently, and produceable shapes include various irregular sections, such as triangular, rectangular, and polygonal sections
Keywords :
electrodeposition; electrodes; micromechanical devices; WEDG; concentricity; electrochemical deposition; microelectrode; micropipe fabrication process; polygonal sections; roundness; straightness; wire electrodischarge grinding; Aerospace industry; Contacts; Electrodes; Fabrication; Machining; Manufacturing; Rough surfaces; Shape control; Surface roughness; Wire;
Conference_Titel :
Micro Electro Mechanical Systems, 1991, MEMS '91, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location :
Nara
Print_ISBN :
0-87942-641-1
DOI :
10.1109/MEMSYS.1991.114773