Title :
Novel porous silicon integrated optical devices for sensing applications
Author :
Xia, Zhixuan ; Eftekhar, Ali Asghar ; Davis, Stanley C., Jr. ; Sandhage, Ken ; Adibi, Ali
Author_Institution :
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
The design, fabrication, and characterization of novel integrated optical sensors comprised of nanoporous silicon are presented. This work lays foundation for a new class of planar integrated photonic sensors with high sensitivity.
Keywords :
elemental semiconductors; integrated optics; nanophotonics; nanoporous materials; nanosensors; optical design techniques; optical fabrication; optical sensors; silicon; Si; nanoporous silicon; planar integrated photonic sensors; porous silicon integrated optical devices; Optical device fabrication; Optical sensors; Silicon; Silicon compounds; Photonic integrated circuits; Porous silicon; Sensors;
Conference_Titel :
Photonics Conference (PHO), 2011 IEEE
Conference_Location :
Arlington, VA
Print_ISBN :
978-1-4244-8940-4
DOI :
10.1109/PHO.2011.6110663
