Title :
Demonstration of waveguide-coupled sidewalled grating filters on SOI
Author :
Veerasubramanian, Venkat ; Beaudin, Guillaume ; Giguère, Alexandre ; Drogoff, Boris Le ; Aimez, Vincent ; Kirk, Andrew G.
Author_Institution :
McGill Univ., Montréal, QC, Canada
Abstract :
We report on the demonstration of waveguide coupled side-walled grating filter fabricated on SOI using e-beam lithography. We obtain a dropped channel extinction of 20 dB and a flat top response using coupled cavities.
Keywords :
electron beam lithography; integrated optics; optical waveguide filters; silicon-on-insulator; SOI; coupled cavities; dropped channel extinction; electron beam lithography; flat top response; silicon-on-insulator; waveguide-coupled sidewalled grating filters; Cavity resonators; Gratings; Optical fiber filters; Optical resonators; Optical waveguides; Resonator filters; coupled waveguide resonators; optical filters; silicon-on-insulator (SOI); vertical gratings;
Conference_Titel :
Photonics Conference (PHO), 2011 IEEE
Conference_Location :
Arlington, VA
Print_ISBN :
978-1-4244-8940-4
DOI :
10.1109/PHO.2011.6110689
