Title :
Design Considerations for a Modular High Precision 3D Coordinate Measuring Machine
Author_Institution :
BrainWare Ltd., Budapest
Abstract :
The appearance of micro electromechanical elements increased demand can be observed for 3D coordinate measuring having submicron measuring uncertainty. The paper gives an overview of various designs and describes the construction of a small (100times100times100 mm) high precision (0.01 mum resolution, less then 0.1 mum measuring uncertainty over the full range) coordinate measuring machine. It has a novel motion system where both coarse and fine positioning is realized by the same control system based on piezo-motor. The construction enables the application of various probes. The coordinate measuring machine was developed as part of a research project
Keywords :
coordinate measuring machines; measurement uncertainty; micromechanical devices; motion control; position control; precision engineering; control system; coordinate measuring machine; measuring uncertainty; micro electromechanical elements; piezomotor; Capacitance; Coordinate measuring machines; Distortion measurement; Machining; Magnetic levitation; Manufacturing; Measurement uncertainty; Metrology; Scanning probe microscopy; Volume measurement;
Conference_Titel :
Mechatronics, 2006 IEEE International Conference on
Conference_Location :
Budapest
Print_ISBN :
0-7803-9712-6
Electronic_ISBN :
0-7803-9713-4
DOI :
10.1109/ICMECH.2006.252516
