Title :
Linearity evaluation of a THz-TDS system by a step attenuator using metalized films
Author :
Iida, Hitoshi ; Kinoshita, Moto ; Shimada, Yozo ; Kuroda, Hideki ; Kitagishi, Keiko ; Izutani, Yusuke
Author_Institution :
Nat. Metrol. Inst. of Japan (NMIJ/AIST), Tsukuba, Japan
Abstract :
We have experimentally developed a terahertz wave step attenuator (TSA) to evaluate linearity of a terahertz time-domain spectroscopy (THz-TDS) system. The TSA is constructed by stacking metalized-film attenuators (MFAs) which have different transmittance. Sputter deposition of Inconel® alloy on thin polyester films is used to fabricate the MFAs. Good repeatability and flatness of the TSA are confirmed in a transmission measurement by the THz-TDS system. This paper reports on linearity evaluation of the THz-TDS system by using the TSA.
Keywords :
attenuators; metallic thin films; sputter deposition; submillimetre wave measurement; submillimetre wave spectroscopy; terahertz spectroscopy; terahertz wave devices; MFA; THz-TDS system; TSA; linearity evaluation; metalized-film attenuator; sputter deposition; terahertz time-domain spectroscopy system; terahertz wave step attenuator; thin polyester film; transmission measurement; Attenuators; Films; Laser beams; Laser excitation; Linearity; Metals; Silicon; Terahertz time-domain spectroscopy; dynamic range; linearity; metalized film; step attenuator; transmittance;
Conference_Titel :
Precision Electromagnetic Measurements (CPEM), 2012 Conference on
Conference_Location :
Washington, DC
Print_ISBN :
978-1-4673-0439-9
DOI :
10.1109/CPEM.2012.6251102
