Linearity evaluation of a THz-TDS system by a step attenuator using metalized films

Author

Iida, Hitoshi ; Kinoshita, Moto ; Shimada, Yozo ; Kuroda, Hideki ; Kitagishi, Keiko ; Izutani, Yusuke

Author_Institution

Nat. Metrol. Inst. of Japan (NMIJ/AIST), Tsukuba, Japan

fYear

2012

fDate

1-6 July 2012

Firstpage

660

Lastpage

661

Abstract

We have experimentally developed a terahertz wave step attenuator (TSA) to evaluate linearity of a terahertz time-domain spectroscopy (THz-TDS) system. The TSA is constructed by stacking metalized-film attenuators (MFAs) which have different transmittance. Sputter deposition of Inconel^® alloy on thin polyester films is used to fabricate the MFAs. Good repeatability and flatness of the TSA are confirmed in a transmission measurement by the THz-TDS system. This paper reports on linearity evaluation of the THz-TDS system by using the TSA.

Keywords

attenuators; metallic thin films; sputter deposition; submillimetre wave measurement; submillimetre wave spectroscopy; terahertz spectroscopy; terahertz wave devices; MFA; THz-TDS system; TSA; linearity evaluation; metalized-film attenuator; sputter deposition; terahertz time-domain spectroscopy system; terahertz wave step attenuator; thin polyester film; transmission measurement; Attenuators; Films; Laser beams; Laser excitation; Linearity; Metals; Silicon; Terahertz time-domain spectroscopy; dynamic range; linearity; metalized film; step attenuator; transmittance;

fLanguage

English

Publisher

ieee

Conference_Titel

Precision Electromagnetic Measurements (CPEM), 2012 Conference on

Conference_Location

Washington, DC

ISSN

0589-1485

Print_ISBN

978-1-4673-0439-9

Type

conf

DOI

10.1109/CPEM.2012.6251102

Filename

6251102