DocumentCode :
2751606
Title :
Highly uniform periodic inverse quantum dots arrays
Author :
Dias, N.L. ; Garg, A. ; Reddy, U. ; Choi, U. ; Coleman, J.J.
Author_Institution :
Univ. of Illinois, Urbana, IL, USA
fYear :
2011
fDate :
9-13 Oct. 2011
Firstpage :
707
Lastpage :
708
Abstract :
We demonstrate high density, periodic arrays of inverse quantum dots with ±1 nm (σd/d = 0.025) variation of the critical dimension. The effect of this variation on the energy dispersion and intersubband gap is evaluated.
Keywords :
etching; optical dispersion; periodic structures; quantum dots; critical dimension; energy dispersion; high density; highly uniform periodic quantum dots arrays; intersubband gap; inverse quantum dots arrays; Dispersion; Electron beams; Geometry; Lattices; Lithography; Quantum dots; Wet etching;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Photonics Conference (PHO), 2011 IEEE
Conference_Location :
Arlington, VA
Print_ISBN :
978-1-4244-8940-4
Type :
conf
DOI :
10.1109/PHO.2011.6110746
Filename :
6110746
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2751606
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