Title :
Magnetic micro-actuator
Author :
Yanagisawa, K. ; Tago, A. ; Ohkubo, T. ; Kuwano, H.
Author_Institution :
NTT Appl. Electron. Lab., Tokyo, Japan
fDate :
30 Jan-2 Feb 1991
Abstract :
The characteristics of three types of magnetic microactuators made by silicon-based microfabrication are described. The microfabrication, actuator configuration, and dynamic characteristics of a fabricated microactuator with a planar coil are examined. This microactuator is shown to operate in the nanometer range. It has a conical soft-magnetic tip 10 microns high with a one-turn copper coil. This actuator will be applied to microvalves, micropumps, and microsyringes
Keywords :
actuators; coils; elemental semiconductors; micromechanical devices; semiconductor technology; silicon; Si; actuator configuration; conical soft-magnetic tip; dynamic characteristics; magnetic microactuators; microfabrication; micropumps; microsyringes; microvalves; nanometer range; planar coil; Actuators; Coils; Magnetic field measurement; Microactuators; Micromachining; Micromagnetics; Micropumps; Microvalves; Silicon; Structural beams;
Conference_Titel :
Micro Electro Mechanical Systems, 1991, MEMS '91, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location :
Nara
Print_ISBN :
0-87942-641-1
DOI :
10.1109/MEMSYS.1991.114781
