Automatic Detection of Laser Damage Threshold by Scattering Light Technique

Author

Liu, Anping ; Duan, Lihua ; Hu, Jianping ; Tang, Ming

Author_Institution

Coll. of Sci.,, Chongqing Univ.

Volume

2

fYear

0

fDate

0-0 0

Firstpage

5318

Lastpage

5321

Abstract

A damage detection and assessment system based on laser-induced changes in surface scattering is reported. It is integrated with a 1064nm, 532nm, 355nm damage test facility used for routine testing of production optics. HfO₂/SiO₂ HR-coating and HfO ₂/SiO₂ AR-coating were tested by this system, and compared with plasma spark method and Nomarski phase contrast microscope method. The results show He-Ne scattering technique is an effective, reliable technique. Plasma spark intensity varies with different film material and plate fashion, and Nomarski phase contrast microscope observation method is an international standard detection method, but it can´t detect some damages and is difficult to detect on line

Keywords

antireflection coatings; hafnium compounds; laser beam effects; light scattering; optical testing; silicon compounds; He-Ne scattering technique; HfO₂-SiO₂; HfO₂/SiO₂ AR-coating; HfO₂/SiO₂ HR-coating; Nomarski phase contrast microscope method; automatic detection; damage detection; damage test facility; international standard detection method; laser damage threshold; laser-induced damage; plasma spark method; production optics; scattering light technique; surface scattering; Hafnium oxide; Laser transitions; Light scattering; Microscopy; Optical scattering; Phase detection; Plasma materials processing; Sparks; Surface emitting lasers; Test facilities; automatic detection; damage threshold; laser-induced damage; scattering light technique;

fLanguage

English

Publisher

ieee

Conference_Titel

Intelligent Control and Automation, 2006. WCICA 2006. The Sixth World Congress on

Conference_Location

Dalian

Print_ISBN

1-4244-0332-4

Type

conf

DOI

10.1109/WCICA.2006.1714085

Filename

1714085