Laser cesium magnetic sensor system based on MEMS technology

The magnetic field sensor of chip level is attracting more and more attention. In this paper, a laser cesium magnetic sensing system based on micro-electro-mechanical system (MEMS) technology was designed. The system was stacked vertically on a silicon chip, with the vertical cavity surface emitting lasers (VCSELs) to pump the absorption chamber between glass and silicon. The magnetic field outside, even very weak, can change the atoms array, and the information of magnetic field therefore is able to be detected by optical pumping. The paper presented the analysis and system design of the laser magnetic sensor system using MEMS technology. The transition process of the particles were calculated and studied. We believe that the magnetic field sensor of chip level will have a wide range of applications.