A Monitoring System of GaN Growth Process

Author

Wang, Jian ; Li, Dan ; Che, Renwei

Author_Institution

Sch. of Electron & Inf. Eng. ,, Dalian Univ. of Technol.

Volume

2

fYear

0

fDate

0-0 0

Firstpage

5363

Lastpage

5366

Abstract

A monitoring system of GaN growth process is introduced. Data acquisition modules, main temperature-controller and flowmeters are connected with standard RS-485 bus to compose the RS-485 network. Gas flow rates are set by the output voltage of D/A board. Vacuometers and assistant temperature-controller are connected with serial ports. Acquisition, displaying, controlling, setting, alarming, and printing of variables in the process are implemented in system program

Keywords

III-V semiconductors; computerised monitoring; data acquisition; flowmeters; gallium compounds; semiconductor growth; temperature control; D/A board; GaN; GaN growth process; RS-485 bus; RS-485 network; data acquisition modules; flowmeters; gas flow rates; long distance communication; monitoring system; serial ports; temperature-controller; vacuometers; Communication system control; Control systems; Data acquisition; Electrons; Fluid flow; Gallium nitride; Intelligent control; Monitoring; Printing; Voltage; RS-485 bus; data acquisition; long distance communication;

fLanguage

English

Publisher

ieee

Conference_Titel

Intelligent Control and Automation, 2006. WCICA 2006. The Sixth World Congress on

Conference_Location

Dalian

Print_ISBN

1-4244-0332-4

Type

conf

DOI

10.1109/WCICA.2006.1714095

Filename

1714095