Micro-step XY-stage using piezoelectric tube actuator

A novel small and simple μm-order-step XY-stage has been developed. It consists of a cylindrical piezoelectric actuator fixed at one end to a baseplate, with one electrode inside the tube and two pairs of diametrical electrodes on the outside. A support is attached to the free end. The actuator is powered by a single cosine waveform voltage by friction force. An analysis shows that the trajectory of the substance is determined by the parameter γ=αω²/(μg), which has no relation to its weight, where α is the amplitude of the support stroke, ω is the angular frequency of the single wave, μ is the friction coefficient, and g is the gravity. The final displacement of the substance has its maximum at x₅/(2α)=0.626 when γ=3.76. The actuator drives the substance on the support two-dimensionally. The stroke and direction of movement are controlled with a joystick