Title :
Friction and wear studies on lubricants and materials applicable to MEMS
Author :
Suzuki, Shigehisa ; Matsuura, Tsukasa ; Uchizawa, Manabu ; Yura, Shinsuke ; Shibata, Hirosh ; Fujita, Hiroyuki
Author_Institution :
Mitsubishi Electr. Corp., Hyogo, Japan
fDate :
30 Jan-2 Feb 1991
Abstract :
A simple method is proposed to evaluate the friction and wear of thin films which can be applied as lubricants to moving surfaces in MEMS (microelectromechanical systems). Thin films of solid and liquid were studied. Large friction coefficient and large wear rate are observed for an SiN/polysilicon combination. Large friction coefficient and slight wear were observed for an SiN/SiN combination. DLC (diamond-like carbon) has a low friction coefficient of 0.2~0.3 with SiN and polysilicon. It is shown that a DLC film and a liquid lubricant film are very effective in reducing friction and wear at the SiN/polysilicon interface
Keywords :
friction; micromechanical devices; semiconductor-insulator boundaries; silicon; silicon compounds; wear testing; DLC film; MEMS; SiN-Si; SiN-SiN; diamond-like carbon; friction; friction coefficient; lubricants; microelectromechanical systems; wear rate; wear studies; Equations; Friction; Lubricants; Magnetic films; Micromechanical devices; Micromotors; Silicon compounds; Solids; Stators; Transistors;
Conference_Titel :
Micro Electro Mechanical Systems, 1991, MEMS '91, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location :
Nara
Print_ISBN :
0-87942-641-1
DOI :
10.1109/MEMSYS.1991.114785
