Al electrodes fabrication technology for high-frequency and high-power durable SAW devices

Author

Yuhara, Akitsuna ; Hosaka, Norio ; Watanabe, Hitoshi ; Yamada, Jun ; Kajiyama, Morio ; Fukaya, Ritsuo ; Kobayashi, Takao

Author_Institution

Hitachi, Ltd., Yokohama, Japan

fYear

1990

fDate

4-7 Dec 1990

Firstpage

493

Abstract

Addition of Ti, Ge, and Zn to sputtered Al electrodes in order to obtain both high power durability and fine dimensional control in high-frequency SAW (surface acoustic wave) devices is investigated. Ti is shown to be more effective than Ge, Zn, and conventional Cu. Improvement of electrode durability to SAW power is related to the grain refinement and static stress incorporated by addition of Ti, Ge, Cu and by the sputter deposition. Investigation of fine dimensional control revealed that the electrodes with Ti addition resulted in smaller width deviation brought about by reactive ion etching a dyed UV-posi-type resist of the vertical wall; the deviation is 40% of that brought about with conventional wet etching

Keywords

aluminium alloys; electrodes; sputter deposition; sputter etching; surface acoustic wave devices; AlGe; AlTi; AlZn; HF devices; SAW devices; dyed UV positive photoresist; electrode durability; fine dimensional control; grain refinement; high power durability; reactive ion etching; sputtered Al electrodes; static stress; width deviation; Acoustic waves; Electrodes; Fabrication; Sputter etching; Sputtering; Stress; Surface acoustic wave devices; Surface acoustic waves; Wet etching; Zinc;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1990. Proceedings., IEEE 1990

Conference_Location

Honolulu, HI

Type

conf

DOI

10.1109/ULTSYM.1990.171413

Filename

171413