Thermal diagnostics of semiconductor devices

Summary form only given. A system is under development which intended for thermal diagnostics for different semiconductor devices. The system consists of hardware and software tools operating interactively and allows: individual measurements of a device under test (DUT), giving its thermal characteristics as obtained from indirect electrical measurements as well as its SOA (safe operation area) boundary when a train of tests is applied; and serial measurements and thermal diagnosis of mounting faults of a particular DUT, indicating a location of a fault and its probable reason (source). The hardware tools are listed. Software tools include packages of programs allowing operation of the hardware system, as well as electrical and thermal analysis programs which in combination with the library of electrothermal DUT models serve for preparation of reference characteristics. Steps in the diagnostic procedure are presented.<>