• DocumentCode
    2753219
  • Title

    On-Chip TSV Testing for 3D IC before Bonding Using Sense Amplification

  • Author

    Chen, Po Yuan ; Wu, Cheng Weu ; Kwai, Ding Ming

  • Author_Institution
    Dept. of Electr. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan
  • fYear
    2009
  • fDate
    23-26 Nov. 2009
  • Firstpage
    450
  • Lastpage
    455
  • Abstract
    We present a novel testing scheme for TSVs in a 3D IC by performing on-chip TSV monitoring before bonding, using a sense amplification technique that is commonly seen on a DRAM. By virtue of the inherent capacitive characteristics, we can detect the faulty TSVs with little area overhead for the circuit under test.
  • Keywords
    amplification; fault diagnosis; integrated circuit testing; system-on-chip; three-dimensional integrated circuits; IC bonding; capacitive characteristics; fault detection; on-chip TSV testing; sense amplification; Bonding; Circuit testing; Electrical fault detection; Fault detection; Integrated circuit testing; Monitoring; Performance evaluation; Random access memory; Three-dimensional integrated circuits; Through-silicon vias; 3D IC; Defect-Based Testing; Interconnection Test; Sense Amplifier; TSV;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Asian Test Symposium, 2009. ATS '09.
  • Conference_Location
    Taichung
  • ISSN
    1081-7735
  • Print_ISBN
    978-0-7695-3864-8
  • Type

    conf

  • DOI
    10.1109/ATS.2009.42
  • Filename
    5359278