Title :
Scanning microdeformation microscopy transmission and reflection operating modes
Author :
Vairac, P. ; Sthal, F. ; Cretin, B.
fDate :
Oct. 31 1994-Nov. 3 1994
Abstract :
In scanning microdeformation microscopy, a vibrating tip is used to scan the sample surface. In transmission mode, the acoustic field is detected with a PZT transducer. In such a system, images are related to surface topography and subsurface elastic inhomogeneities. Main feature is the spatial resolution that is related to the tip diameter as in other near field microscopes. The presented paper reports the new setup operating in reflection mode and high resolution (~1 μm) images obtained with a small diamond tip at low frequency. Transmission and reflection modes are analysed and compared. Following the hertzian theory, theoretical interpretation of the image contrast is given to explain, for example, the sensitivity to crystalline orientation in metals
Keywords :
acoustic microscopy; surface topography measurement; ultrasonic applications; ultrasonic reflection; ultrasonic transmission; PZT transducer; acoustic field; crystalline orientation; diamond tip; hertzian theory; high resolution images; image contrast; metals; reflection mode; sample surface; scanning microdeformation microscopy; spatial resolution; subsurface elastic inhomogeneities; surface topography; tip diameter; transmission mode; vibrating tip; Acoustic microscopy; Acoustic reflection;
Conference_Titel :
Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE
Conference_Location :
Cannes, France
Print_ISBN :
0-7803-2012-3
DOI :
10.1109/ULTSYM.1994.401853
