Title :
Silicon bulk micromachining
Author :
Esashi, Masayoshi ; Haga, Yoichi
Author_Institution :
Tohoku University
Keywords :
Assembly; Catheters; Circuits; Coils; Communication system control; Etching; Micromachining; Optical fiber sensors; Optical fibers; Silicon;
Conference_Titel :
Microtechnologies in Medicine and Biology, 1st Annual International, Conference On. 2000
Print_ISBN :
0-7803-6603-4
DOI :
10.1109/MMB.2000.893730
