Biochip for PCR amplification in silicon

A micro liter PCR (polymerase chain reaction) biochip was designed and fabricated for DNA amplification. It was consist of a vessel, platinum thin film heater and a temperature sensor. The heater and sensor were deposited on to the bottom of the vessel. Its advantage is rapid thermal cycling time constant. The PCR vessel is approximately 2 μL, the maximal heating speed is over 15°C/s and cooling speed 10°C/s. This paper reports the PCR vessel´s structure, chip package problems and solutions, its thermal uniformity analysis, DNA molecular testing results etc. The design of the thermal controller for the PCR biochip is described