Title :
Vibration analysis of new shape G-type quartz crystal resonator formed by etching method
Author :
Kawashima, Hitoshi ; Matsuyama, Masaru
Author_Institution :
Seiko Electron. Components Ltd., Tochigi, Japan
Abstract :
The frequency temperature behavior and electrical characteristics of a novel G-type quartz crystal resonator, formed by an etching method, are described. An objective of the present research is to provide a miniaturized quartz crystal resonator with a frequency of approximately 1 MHz. A novel shaped G-type portion and supporting portions is proposed, and its resonator frequency constant, frequency temperature behavior, and electrical characteristics are theoretically and experimentally clarified in order to realize a miniaturized quartz crystal resonator with a zero temperature coefficient and good electrical characteristics
Keywords :
crystal resonators; etching; piezoelectric oscillations; quartz; 1 MHz; G-type quartz crystal resonator; SiO2; electrical characteristics; etching method; frequency temperature behavior; miniaturized quartz crystal resonator; vibration analysis; zero temperature coefficient; Electric resistance; Electric variables; Electronic components; Etching; Group technology; Partial differential equations; Q factor; Resonant frequency; Shape; Temperature;
Conference_Titel :
Ultrasonics Symposium, 1990. Proceedings., IEEE 1990
Conference_Location :
Honolulu, HI
DOI :
10.1109/ULTSYM.1990.171426