DocumentCode
2755687
Title
Lateral DC contact RF MEMS switch with fine gap combs
Author
Kang, Sungchan ; Kim, Hyeon Cheol ; Chun, Kukjin
Author_Institution
Seoul Nat. Univ., Seoul
fYear
2007
fDate
Oct. 30 2007-Nov. 2 2007
Firstpage
1
Lastpage
4
Abstract
We developed lateral DC contact RF MEMS switch using combs. Our goal was to fabricate RF MEMS switch with high reliability and good RF characteristics for FEM module in wireless transceiver system. Therefore, we used silicon substrate for combs in order to achieve big contact force, small off-state capacitance, and high reliability. As a result, our switch showed insertion loss less than 0.44 dB at 2 GHz, isolation greater than 60 dB, and low actuation voltage at 26 V.
Keywords
microswitches; reliability; transceivers; FEM module; RF MEMS switch; insertion loss; lateral DC contact; reliability; wireless transceiver; Capacitance; Contacts; Electrostatics; Radio frequency; Radiofrequency microelectromechanical systems; Silicon; Switches; Teeth; Transceivers; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
TENCON 2007 - 2007 IEEE Region 10 Conference
Conference_Location
Taipei
Print_ISBN
978-1-4244-1272-3
Electronic_ISBN
978-1-4244-1272-3
Type
conf
DOI
10.1109/TENCON.2007.4429090
Filename
4429090
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