Title :
Fabrication of active integrated optical micro-encoder
Author :
Sawada, R. ; Tanaka, H. ; Ohguchi, O. ; Shimada, J. ; Hara, S.
Author_Institution :
NTT Corp., Tokyo, Japan
fDate :
30 Jan-2 Feb 1991
Abstract :
A novel integrated optical micro-encoder based on diffraction is presented, which can measure the relative distance traveled against a grating (scale) in the grating vector direction. A measurement resolution of less than 0.01 μm is possible. The encoder is extremely small, only 500-μm square, which is 1/100 the size of conventional encoders. Therefore, the encoder can be incorporated into a micro-machine and can be moved at high speed, since its inertia is extremely low. This encoder can be used even when the gap between the encoder and the grating is a few hundred micrometers
Keywords :
angular measurement; encoding; integrated optics; active integrated optical micro-encoder; grating vector direction; measurement resolution; micro-machine; relative distance; Dielectric substrates; Diffraction gratings; Diode lasers; Etching; High speed optical techniques; Integrated optics; Optical device fabrication; Optical devices; Optical sensors; Ultraviolet sources;
Conference_Titel :
Micro Electro Mechanical Systems, 1991, MEMS '91, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location :
Nara
Print_ISBN :
0-87942-641-1
DOI :
10.1109/MEMSYS.1991.114802
