Interdigitated humidity sensors for a portable clinical microsystem

Author

Laville, Céline ; Pellet, Claude ; N´Kaoua, Gilles

Author_Institution

Lab. IXL, Bordeaux I Univ., Talence, France

fYear

2000

fDate

2000

Firstpage

572

Lastpage

577

Abstract

Presents and compares two capacitive humidity sensors with interdigitated electrodes for a portable clinical application. The first structures are covered by a polyimide sensitive layer and the optimised ones include a BCB sensitive layer and a heating resistor. Humidity measurements results are presented, in particular sensors response time in absorption which are very small (inferior to 500 ms). Then, mechanisms of absorption and adsorption in a polymer layer are described and the two structures are compared. The suitability of optimised sensors for the authors´ application is discussed: new structures permit to increase sensitivity and decrease response time. When the structure is maintained at 40°C by its heater, the response time is 200 ms and the total desorption time is 11 s

Keywords

biomedical electronics; biomedical equipment; capacitive sensors; humidity sensors; resistors; 11 ms; 200 ms; 40 C; 500 ms; BCB sensitive layer; absorption mechanisms; adsorption mechanisms; capacitive humidity sensors; heating resistor; interdigitated humidity sensors; polyimide sensitive layer; polymer layer; portable clinical microsystem; response time decrease; sensors response time; total desorption time; Absorption; Capacitance; Capacitive sensors; Delay; Electrodes; Humidity measurement; Laboratories; Permittivity measurement; Polyimides; Polymers;

fLanguage

English

Publisher

ieee

Conference_Titel

Microtechnologies in Medicine and Biology, 1st Annual International, Conference On. 2000

Conference_Location

Lyon

Print_ISBN

0-7803-6603-4

Type

conf

DOI

10.1109/MMB.2000.893849

Filename

893849