• DocumentCode
    2757227
  • Title

    A piezo-electric pump driven by a flexural progressive wave

  • Author

    Miyazaki, Shun-ichi ; Kawai, Takashi ; Araragi, Muneki

  • Author_Institution
    Yokogawa Electr. Corp., Tokyo, Japan
  • fYear
    1991
  • fDate
    30 Jan-2 Feb 1991
  • Firstpage
    283
  • Lastpage
    288
  • Abstract
    An effort was made to confirm the possibility of pumping fluids by flexural progressive waves on a thin pipe. A piezoelectric ceramic plate whose composition changes periodically can generate a flexural progressive wave when two sinusoidal voltages (V0 sin ω t and V0 cos ω t) are applied. A thin metal pipe that has been flattened is bonded to an FGM piezoelectric ceramic plate. Both ends of the pipe are closed and two glass pipes are joined perpendicularly to the metal pipe. The pipes are then filled with purified water. When a flexural progressive wave is excited on the plate, pressure is generated between the glass pipes. The pressure is about 10 mm H2O. When the phase difference between the two sinusoidal voltages is changed by 180°, the pressure difference is inverted. The size of the plate is 230×50×0.6 mm3, the diameter of the metal pipe is 1.4 mm, the thickness of the wall is 18 μm, and the pipe is flattened to 300 μm
  • Keywords
    ceramics; piezoelectric devices; pumps; FGM piezoelectric ceramic plate; flexural progressive wave; piezo-electric pump; piezoelectric ceramic plate; pressure difference; sinusoidal voltages; Bonding; Ceramics; Fabrication; Fluid flow control; Glass; Instruments; Micromotors; Pumps; Research and development; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 1991, MEMS '91, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
  • Conference_Location
    Nara
  • Print_ISBN
    0-87942-641-1
  • Type

    conf

  • DOI
    10.1109/MEMSYS.1991.114811
  • Filename
    114811