Title :
Comparaitve Economic Analysis Of Mcm-d Fabrication Costs
Author :
Garrou, P. ; Heistand, R. ; Frye, D. ; Carr, J. ; Burdcaux, D.
Keywords :
Ceramics; Chemical processes; Costs; Dielectric materials; Dielectric substrates; Dielectric thin films; Fabrication; Semiconductor device modeling; Sputtering; Transistors;
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1993., Proceedings of 1993 Japan International
Print_ISBN :
0-7803-1432-8
DOI :
10.1109/IEMT.1993.639735
