Modelling a Micro Manipulation System with Flexure Hinge

This paper deals with the study of micro manipulation system that is composed of piezoelectric actuator attached on flexure hinge mechanism. It has been the fact that hysteresis is inherent in any piezoelectric actuators, especially when using voltage steering which in turn can degrade the performance of the system thus it should be treated carefully. In this paper, a simple Dahl model is constructed to capture the hysteresis effect together with the mechanical model. For simplicity, the nature of the micro manipulator is assumed to be modelled as lumped parameters. Then a hysteresis observer is constructed based on this model for estimating the hysteresis effect. Finally, some simulations are performed. It is seen that the hysteresis could be well estimated