A novel MMI-MI SOI temperature sensor

Author

Tsao, Shyh-Lin ; Peng, Peng-Chun ; Lee, Shin-Ge

Author_Institution

Dept. of Electr. Eng., Yuan-Ze Inst. of Technol., Chungli, Taiwan

Volume

2

fYear

2000

fDate

2000

Firstpage

464

Abstract

We further develop a novel multimode-interference Michelson interferometer (MMI-MI) temperature sensor based on integrated optics technology. The sensor is made of a multimode interference coupler for achieving a Michelson interferometer (MI) sensor on a silicon-on-insulator (SOI) wafer. SOI technology shows great potential for monolithic complementary metal-oxide semiconductor (CMOS) high-speed opto-electronic devices. The MMI-MI SOI temperature sensor we designed can also reduce the sensor size and be embedded in a monolithic integrated opto-electronic circuit

Keywords

CMOS integrated circuits; Michelson interferometers; integrated optics; integrated optoelectronics; optical couplers; optical sensors; silicon-on-insulator; temperature sensors; CMOS high-speed opto-electronic devices; MMI-MI SOI temperature sensor; Michelson interferometer sensor; SOI technology; integrated optics technology; monolithic complementary metal-oxide semiconductor; monolithic integrated opto-electronic circuit; multimode interference coupler; multimode-interference Michelson interferometer temperature sensor; sensor size; silicon-on-insulator wafer; CMOS technology; Coupling circuits; Integrated circuit technology; Integrated optics; Interference; MOS devices; Optical interferometry; Optoelectronic devices; Silicon on insulator technology; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society 2000 Annual Meeting. LEOS 2000. 13th Annual Meeting. IEEE

Conference_Location

Rio Grande

ISSN

1092-8081

Print_ISBN

0-7803-5947-X

Type

conf

DOI

10.1109/LEOS.2000.893915

Filename

893915