Design and Numerical Stress Analysis of Silicon Membrane Hibachi Windows

Author

Jun, Chang H. ; Gentile, Charles ; Priniski, Craig ; Sethian, John

Author_Institution

Princeton Plasma Phys. Lab., NJ

fYear

2005

fDate

Sept. 2005

Firstpage

1

Lastpage

4

Abstract

A silicon membrane windows is developed for a KrF laser system. The main function of the windows is to pass electron beam into the laser cell and to hold pressurized gas in the cell. 150 micro-meter thick silicon windows successfully survived from heated electron beam bombardment and shows 80% of electron beam transmission rate. The single silicon windows endured 250,000 cycles of electron beam shots. The arrayed windows did not show sufficient performance due to excessive heat generation. To enhance the longevity, the cooling system has to be improved and a study of the arc generated by the cathode is necessary

Keywords

cathodes; electron beam pumping; elemental semiconductors; excimer lasers; krypton compounds; laser accessories; membranes; optical materials; optical windows; silicon; 150 mm; KrF; KrF laser system; Si; arcs; arrayed windows; cathode; cooling system; electron beam shots; electron beam transmission rate; heat generation; heated electron beam bombardment; laser cell; numerical stress analysis; pressurized gas; silicon membrane Hibachi windows; Biomembranes; Cathodes; Conducting materials; Electron beams; Gas lasers; Laboratories; Laser fusion; Optical materials; Silicon; Stress; Corrosion by gas; Diamond coating; Electron beam; KrF laser; Silicon Window; Transmission rate;

fLanguage

English

Publisher

ieee

Conference_Titel

Fusion Engineering 2005, Twenty-First IEEE/NPS Symposium on

Conference_Location

Knoxville, TN

Print_ISBN

0-4244-0150-X

Electronic_ISBN

0-4244-0150-X

Type

conf

DOI

10.1109/FUSION.2005.252867

Filename

4018901